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A Guide to Hands-on MEMS Design and Prototyping

Autor Joel A. Kubby
en Limba Engleză Hardback – 24 aug 2011
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.
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Specificații

ISBN-13: 9780521889254
ISBN-10: 0521889251
Pagini: 178
Ilustrații: 132 b/w illus. 1 table 33 exercises
Dimensiuni: 158 x 235 x 14 mm
Greutate: 0.4 kg
Editura: Cambridge University Press
Colecția Cambridge University Press
Locul publicării:Cambridge, United Kingdom

Cuprins

1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.

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Descriere

Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide for students and professionals.