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Advanced Metallization Conference 2006 (AMC 2006): Volume 22: MRS Conference Proceedings

Editat de Stephen W. Russell, Michael E. Mills, Akihiko Osaki, Takashi Yoda
en Limba Engleză Hardback – 31 dec 2006
The Advanced Metallization Conference 2006 - held in Tokyo and San Diego, California - highlights both current state-of-the-art and ongoing challenges associated with multilevel interconnects. Technical leaders from around the world gathered to discuss developments in the integration of low-dielectric constant materials with copper-based metallization, and advances in the means by which process- or stress-induced damage can be mitigated and reliability of the interconnect system improved. Contributions to the volume focus on design, development and modeling of advanced on-chip and multichip interconnect architectures and real-world implementation of optimized designs, materials and processes for production of leading-edge microelectronic devices. A keynote address by H.-S. Philip Wong, Stanford University, on 'Nanostructured Materials for Interconnects' is featured.
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Specificații

ISBN-13: 9781558999473
ISBN-10: 1558999477
Pagini: 715
Dimensiuni: 158 x 235 x 41 mm
Greutate: 1.06 kg
Editura: Materials Research Society
Colecția Materials Research Society
Seria MRS Conference Proceedings

Locul publicării:Warrendale, Pittsburgh, United States

Descriere

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.