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Beam Technologies for Integrated Processing

Autor National Research Council, Division on Engineering and Physical Sciences, National Materials Advisory Board, Commission on Engineering and Technical Systems, Committee on Beam Technologies Opportunities in Attaining Fully Integrated Processing Systems
en Limba Engleză Paperback – feb 1992
Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components.
This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
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Specificații

ISBN-13: 9780309046350
ISBN-10: 0309046351
Pagini: 106
Dimensiuni: 216 x 280 mm
Editura: National Academies Press