Borophosphosilicate Glass Thin Films in Electronics
Editat de Vladislav Yu Vasilyeven Limba Engleză Hardback – 30 iun 2013
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Specificații
ISBN-13: 9781624179594
ISBN-10: 1624179592
Pagini: 222
Ilustrații: illustrations
Dimensiuni: 259 x 185 x 19 mm
Greutate: 0.64 kg
Editura: Nova Science Publishers Inc
ISBN-10: 1624179592
Pagini: 222
Ilustrații: illustrations
Dimensiuni: 259 x 185 x 19 mm
Greutate: 0.64 kg
Editura: Nova Science Publishers Inc
Cuprins
Introduction; Brief Historical Overview of BPSG Thin Film Research; Basic BPSG Film CVD Tools & Methodology; Basic BPSG CVD Kinetic Features; As-Deposited BPSG Film Step Coverage & Gap-Fill; Glass Film CVD Schemes; BPSG Film Industrial CVD Technology; Brief Review on BPSG Thin Film Analysis Techniques; BPSG Film Composition; BPSG Film Structure; Basic BPSG Film Properties; BPSG Film Flow Capability; BPSG Film Ambient Moisture Interaction; Defect Formation Phenomenon in BPSG Films; Interrelation of BPSG Film Deposition, Composition, Structure, & Properties; Thermally Induced BPSG Film Viscous Flow On Stepped IC Device Structures; BPSG Film Composition Optimization; BPSG Film Durability; BPSG Films in Electronic Technologies; Conclusion; Index.