The robustness of various cooperative control schemes on large scale networked systems with respect to heterogeneous communication and coupling delays is investigated. The presented results provide delay-dependent and delay-independent conditions that guarantee consensus, rendezvous, flocking, and synchronization in different classes of multi-agent systems (MAS). All conditions are scalable to arbitrarily large multi-agent systems with non-identical agent dynamics. In particular, conditions for linear agents, for nonlinear agents with relative degree one, and for a class of nonlinear agents with relative degree two are presented. The interconnection topology between the agents is in most cases represented by an undirected graph. The results for nonlinear agents with relative degree one hold also for the more general case of directed graphs with switching topologies. Different delay configurations are investigated and compared. These configurations represent different ways how the delays affect the coupling between the agents. The presented robustness analysis considers constant, time-varying, and distributed delays in order to take different sources of delays into account. The results are applied to several typical applications and simulations illustrate the findings.