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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

Autor Christopher Taudt
en Limba Engleză Paperback – 17 noi 2021
This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the developmentof a novel mathematical analysis approach.
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Specificații

ISBN-13: 9783658359256
ISBN-10: 3658359250
Pagini: 163
Ilustrații: XXIII, 163 p. 65 illus. in color.
Dimensiuni: 148 x 210 mm
Greutate: 0.23 kg
Ediția:1st ed. 2022
Editura: Springer Fachmedien Wiesbaden
Colecția Springer Vieweg
Locul publicării:Wiesbaden, Germany

Cuprins

1 Introduction and motivation.- 2 Related works and basic considerations.- 3 Surface profilometry.- 4 Polymer characterization.- 5 Thin-film characterization.- 6 Conclusion.

Notă biografică

Christopher Taudt holds a diploma degree in Mechanical Engineering of the WH Zwickau. During a stay at the IT Sligo, Ireland, he earned a Bachelor Degree in Mechanical Engineering. After his studies, Christopher Taudt has worked on research projects in optical metrology and earned a PhD in optical metrology from the TU Dresden.

Textul de pe ultima copertă

This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the developmentof a novel mathematical analysis approach.

About the Author
Christopher Taudt holds a diploma degree in Mechanical Engineering of the WH Zwickau. During a stay at the IT Sligo, Ireland, he earned a Bachelor Degree in Mechanical Engineering. After his studies, Christopher Taudt has worked on research projects in optical metrology and earned a PhD in optical metrology from the TU Dresden.

Caracteristici

current challenges in surface metrology with a single, new interferometric approach A novel metrology to enhance current high-precision surface manufacturing technologies This is an Open Access-book