Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology
Autor Donald L. Tolliveren Limba Engleză Hardback – 30 dec 1988
What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology.
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Specificații
ISBN-13: 9780815511519
ISBN-10: 0815511515
Pagini: 509
Dimensiuni: 152 x 229 x 30 mm
Greutate: 0.74 kg
Editura: ELSEVIER SCIENCE
ISBN-10: 0815511515
Pagini: 509
Dimensiuni: 152 x 229 x 30 mm
Greutate: 0.74 kg
Editura: ELSEVIER SCIENCE
Public țintă
Engineers, scientists and managers in the semiconductor and microelectronics industries concerned with preventing and controlling contamination.Cuprins
Aerosol Filtration Technology
Instrumentation for Aerosol Measurement
Clean Room Garments and Fabrics
Guidelines for Clean Room Management and Discipline
Electrostatics in Clean Rooms
Ultra High Purity Water-New Frontiers
Deionized (DI) Water Filtration Technology
Monitoring System for Semiconductor Fluids
Particles in Ultrapure Process Gases
Contamination Control and Concerns in VLSI Lithography
Contamination Control in Electronic Chemicals
Surface Particle Detection Technology
Particle Contamination by Process Equipment
Wafer Automation and Transfer System
Conclusion
References
Glossary
Index
Instrumentation for Aerosol Measurement
Clean Room Garments and Fabrics
Guidelines for Clean Room Management and Discipline
Electrostatics in Clean Rooms
Ultra High Purity Water-New Frontiers
Deionized (DI) Water Filtration Technology
Monitoring System for Semiconductor Fluids
Particles in Ultrapure Process Gases
Contamination Control and Concerns in VLSI Lithography
Contamination Control in Electronic Chemicals
Surface Particle Detection Technology
Particle Contamination by Process Equipment
Wafer Automation and Transfer System
Conclusion
References
Glossary
Index
Recenzii
"àshould be in the library of all microelectronics engineers and designers." --Microelectronics & Reliability