Interactions of Ions with Condensed Matter, Volume 229: Horizons in World Physics: Horizons in World Physics

Contents: Sputtering of Monoelemental Solids -- Ion Energy Losses; Collision Cascades; Physical Sputtering. Sputtering of Multielement Solids -- Preferential Sputtering; Modelling of Preferential Sputtering. Formation of the Altered Layer -- Collisional Mixing; Modelling of Collisional Mixing; Thermal Diffusion; Radiation Enhanced Diffusion; Radiation Enhanced Diffusion and Sputtering; Preferential Sputtering and Interdiffusion; Radiation Activated Temperature Gradient Diffusion; Segregation. Surface Topography -- Development of Surface Roughness; Roughening Effects on Ion Beam Profiling of Multilayers; Modelling of Sputtering of Multilayers. Heterogeneous Processes in Reactive Plasma -- Plasmochemical Etching; Model of Etching Kinetics; Etching Profiles; Modelling of Etching Through a Mask.