MEMS: Nanotechnology Incorporated - discusses MEMS & Nanotechnology as M.E. degree level subject. The book introduces first the most accepted MEMS concepts such as design, fabrication and devices, then Nanotechnology concepts such as properties, synthesis and characterization, and finally Basics for MEMS & Nanotechnology such as multiphysics, quantum confinement, etc. The book is divided into seven chapters - 3 on MEMS, 2 on Nanotechnology and 2 on Basics. This book is intended mainly to serve as a textbook for ME (Mechatronics Engineering) and as reference book for BE (Mechanical, Automobile & Aeronautical Engineering), BE & ME (Nanotechnology), and M.Sc.(Nanotechnology). This book covers all topics for MEMS & Nanotechnology in M.E. (Mechatronics Engineering). Again to say, It is my hope that book will become an invaluable source of essential information for academic, industrial, and governmental researchers working in mechanical engineering, materials science, electrical engineering, polymer science, physics, aerospace engineering, microelectronics, computational methods and others interested in MEMS & Nanotechnology.