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Measurement Technology for Micro–Nanometer Devices de Wendong Zhang

Measurement Technology for Micro–Nanometer Devices

Autor Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
en Limba Engleză Hardback – 29 dec 2016
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale * Highlights the advanced research work from industry and academia in micro-nano devices test technology * Written at both introductory and advanced levels, provides the fundamentals and theories * Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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Specificații

ISBN-13: 9781118717967
ISBN-10: 1118717961
Pagini: 344
Dimensiuni: 177 x 250 x 21 mm
Greutate: 0.68 kg
Editura: Wiley
Locul publicării:Singapore, Singapore

Public țintă

Tier C/P&R
Primary: Engineers and researchers in the micro– and nano–fabrications, MEMS/NEMS devices, advanced instrumentation. Graduate students of instrument science technology disciplines, precision manufacture and optic instrument manufacture disciplines.
Secondary: Graduate, senior undergraduate students, researchers, engineers in related disciplines

Notă biografică

WENDONG ZHANG, North University of China, China
XIUJIAN CHOU, North University of China, China
TIELIN SHI, Huazhong University of Science and Technology, China
ZONGMIN MA, North University of China, China
HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China
JING CHEN, Peking University, China
LIGUO CHEN, Soochow University, China
DACHAO LI, Tianjin University, China
CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China

Descriere

Dealing with the technologies for measurement at the small scale, this book highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories.