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MEMS and NEMS: Systems, Devices, and Structures: Nano- and Microscience, Engineering, Technology and Medicine

Autor Sergey Edward Lyshevski
en Limba Engleză Hardback – 18 ian 2002
The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.
MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.
The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.
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Specificații

ISBN-13: 9780849312625
ISBN-10: 0849312620
Pagini: 461
Ilustrații: 151 b/w images
Dimensiuni: 156 x 234 x 34 mm
Greutate: 1.04 kg
Ediția:1
Editura: CRC Press
Colecția CRC Press
Seria Nano- and Microscience, Engineering, Technology and Medicine


Public țintă

Professional

Cuprins

Overview and Introduction. New Trends in Engineering and Science: Micro- and Nanoscale Systems. Fundamentals of MEMS Fabrication. Devising and Synthesis of MEMS and NEMS. Modeling of Micro- and Nanoelectromechanical Systems, Devices, and Structures. Nanosystems, Quantum Mechanics, and Mathematical Models. Control of Microelectromechanical Systems. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS. Index.

Recenzii

"This book … provides an excellent introduction to MEMS and NEMS systems, devices, structures, and fabrication. …its main strength is in the mathematical models derived for the various devices covered in the text. …[It includes] a good overview of practical technology currently in use. …The book is an excellent place to begin studying MEMS and NEMS."
-IEEE Electrical Insulation Magazine, Vol. 20, No. 4, July/Aug. 2004

Descriere

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how to analyze processes, phenomena, and properties at nano- and micro-scales and illustrates development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.