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MEMS Mechanical Sensors: Mems--Microelectromechanical Systems Series

Autor Steve P. Beeby, Graham Ensel, Neil M. White
en Limba Engleză Hardback – 30 apr 2004
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
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Specificații

ISBN-13: 9781580535366
ISBN-10: 1580535364
Pagini: 269
Ilustrații: 1
Dimensiuni: 184 x 264 x 20 mm
Greutate: 0.64 kg
Editura: Artech House Publishers
Seria Mems--Microelectromechanical Systems Series


Descriere

Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.