Methods and Materials in Microelectronic Technology: The IBM Research Symposia Series
Autor Joachim Bargonen Limba Engleză Paperback – 24 dec 2012
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Specificații
ISBN-13: 9781468448498
ISBN-10: 1468448498
Pagini: 380
Ilustrații: VIII, 367 p.
Dimensiuni: 178 x 254 x 20 mm
Greutate: 0.66 kg
Ediția:Softcover reprint of the original 1st ed. 1984
Editura: Springer Us
Colecția Springer
Seria The IBM Research Symposia Series
Locul publicării:New York, NY, United States
ISBN-10: 1468448498
Pagini: 380
Ilustrații: VIII, 367 p.
Dimensiuni: 178 x 254 x 20 mm
Greutate: 0.66 kg
Ediția:Softcover reprint of the original 1st ed. 1984
Editura: Springer Us
Colecția Springer
Seria The IBM Research Symposia Series
Locul publicării:New York, NY, United States
Public țintă
ResearchCuprins
Impact of Microelectronics- Technical, Economical and Social Aspects.- Milestones in Silicon Semiconductor Technology.- Electronic Transport in Semiconductor Materials.- Recent Advances in the Theory of Impurities and Defects in Semiconductors.- Silicide Contact and Gate in Microelectronic Devices.- Photolithography and X-Ray Lithography.- Electron Beam Lithography.- Microlithography for VLSI and Beyond.- Lithographic Materials.- Reactive Ion Etching and Related Polymerization Processes.- Organic Insulators.- Multilayer Ceramics.- High Performance Cooling and Large Scale Integration.- Limitation of Digital Electronics.- Electron Beam Microcircuit Inspection Technique.