The field of Microsystems is a rapidly evolving topic. This is due to the increasing quantities of micro-sensors through their integration into smartphones and their manifold use in cars, as well as through the use of these sensors in new areas, such as medical technology. With the present textbook as a tool, the reader will be able to get to know the state of the art in this field, and to successfully use Microsystems in various applications. The following textbook is based on the lecture module "Microsystems," which is held at University of Applied Sciences Bielefeld in the 6th semester of the bachelor course electrical engineering. The lecture module includes a practical course, which deals with the structure and the characterization of an acceleration sensor module. The instructions for this course are attached at the end of the book. This book is translated from the original German "Mikrosysteme" .