Physics of Radio-Frequency Plasmas
Autor Pascal Chabert, Nicholas Braithwaiteen Limba Engleză Hardback – 23 feb 2011
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Specificații
ISBN-13: 9780521763004
ISBN-10: 0521763002
Pagini: 394
Ilustrații: 156 b/w illus. 144 exercises
Dimensiuni: 180 x 253 x 21 mm
Greutate: 0.82 kg
Editura: Cambridge University Press
Colecția Cambridge University Press
Locul publicării:Cambridge, United Kingdom
ISBN-10: 0521763002
Pagini: 394
Ilustrații: 156 b/w illus. 144 exercises
Dimensiuni: 180 x 253 x 21 mm
Greutate: 0.82 kg
Editura: Cambridge University Press
Colecția Cambridge University Press
Locul publicării:Cambridge, United Kingdom
Cuprins
1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index.
Recenzii
"Chabert and Braithwaite have produced an excellent guide to the diversity of RF powered plasmas, as used for many technological processes. The value of combining experiment and theory is well demonstrated. They have given explanations of plasma behavior that will suffice for many readers’ purposes but that also provide a clear introduction to more difficult plasma conditions as the subject develops further complexities."
John I.B. Wilson in Contemporary Physics
John I.B. Wilson in Contemporary Physics
Notă biografică
Descriere
Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.