Solid Acoustic Waves and Vibration: Theory and Applications
Autor Li-Feng Geen Limba Engleză Hardback – 17 oct 2021
As MEMS and NEMS technology develops, a number of new issues presents, such as the effects of residual stress, thin-film, air captured in micro-air-gaps and coating on the system, which make the problem complicated and spark debates. Micro-diaphragms are modeled by a plate in tension and mounted on air-spring, a general TDK equation of vibration of plates, including free, forced and damped vibrations, and its solutions are developed. The loading effect of coating is modeled by a mass load; a micro-load theory is presented. This book is a summary of the author's long-term research on electromechanical transducers and these related issues, and they provide an excellent description combining theory and application. The principle of electromechanical transducers, which achieve the conversion between mechanical and electrical energy, occupying a particularly important position in the field of robotics and intelligent machines, is elucidated by introducing the concepts of space-time operator, complex transformation factor, inversion impedance, etc., and an unfiled equivalent circuit is presented. The applications in micromachined capacitive ultrasonic transducers (mCUTs, CMUTs) for biomedical imaging and ultrasonic mass resonators (mUMRs) for biochemical sensing, including plate-type, beam-type, nanowire, bulk-wave, LAW and SAW delay-line ultrasonic resonators are described. This interdisciplinary book will be increasingly attractive as MEMS and NEMS technology develops.
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Specificații
ISBN-13: 9789811235009
ISBN-10: 9811235007
Pagini: 436
Dimensiuni: 157 x 235 x 28 mm
Greutate: 0.76 kg
Editura: World Scientific Publishing Company
ISBN-10: 9811235007
Pagini: 436
Dimensiuni: 157 x 235 x 28 mm
Greutate: 0.76 kg
Editura: World Scientific Publishing Company