There are numerous techniques available for providing detailed compositional information of the surface of materials. This volume aims to clarify those techniques which use particles as various kinds of probes for surface analysis. For each technique it provides a description of the physical principle, the method of operation, the nature of information, the range of application, and the advantages and disadvantages of each of the current techniques of surface compositional analysis. The techniques are grouped according to the nature of the incident radiation: electron excitation, photon excitation, ion excitation, and neutral excitation.