Cantitate/Preț
Produs

Understanding Key Molecular Properties in a CVD Process Feasibility Study

Autor Rolf Claessen
de Limba Germană Paperback – 31 iul 2002
Dieses Buch untersucht das Grundprinzip des Designs von Vorl ufermolek len f r CVD Prozesse. Der Effekt von molekularen Eigenschaften dieser Molek le auf den CVD Prozess wird sowohl experimentell als auch theoretisch erforscht. Eine neuartige Klasse von Liganden und resultierenden Komplexen wird als Beispiel f r ma geschneiderte Vorl ufermolek le f r CVD Prozesse demonstriert. Haupteigenschaften wie z.B. thermische Zersetzung und Fl chtigkeit k nnen unabh ngig eingestellt werden und auf den indiviuellen CVD Prozess abgestimmt werden. This book examines the rationale of precursor design for a CVD (Chemical Vapor Deposition) process. The effect of molecular properties on the CVD process outcome is investigated experimentally and computationally. A novel class of ligands and resulting complexes is demonstrated as an example of tailormade precursors for CVD processes. Key properties such as thermal decomposition and volatility are shown to be independently tunable and can be adjusted to the individual process needs
Citește tot Restrânge

Preț: 27452 lei

Nou

Puncte Express: 412

Preț estimativ în valută:
5255 5463$ 4357£

Carte tipărită la comandă

Livrare economică 05-19 februarie 25

Preluare comenzi: 021 569.72.76

Specificații

ISBN-13: 9783831142743
ISBN-10: 3831142742
Pagini: 212
Dimensiuni: 172 x 221 x 17 mm
Greutate: 0.39 kg
Editura: Books on Demand GmbH

Notă biografică

Born 1972 in Cologne, Rolf Claessen received his Ph.D. in 2002 for his work on precursor design for CVD processes. He can be reached via email at books@claessen.net Additional information and data may be obtained online at www.claessen.net/books.