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Advanced Metallization Conference 2008 (AMC 2008): Volume 24: MRS Conference Proceedings

Editat de Mehul Naik, Roey Shaviv, Takashi Yoda, Kazuyoshi Ueno
en Limba Engleză Hardback – 31 dec 2008
The Advanced Metallization Conference - held in San Diego, California, and Tokyo, Japan - marked its 25th anniversary in 2008. These two sister conferences form a unique 'one conference at two sites' that focuses on the latest R&D and manufacturing results, as well as real-world integration and reliability data on the application of metallization and related technologies for advanced IC devices. Scientists and engineers from around the world came to listen and present state-of-the-art work in the field of ULSI interconnect technology including metallization, dielectrics, integration, packaging, design and vertical integration. A keynote address by Gary Patton, vice president, IBM Systems and Technology Group, on 'Leading-edge Silicon Technology through Innovation and Collaboration', is featured. Additional topics include: integration; metallization; materials and characterization; CMP and cleaning; 3D integration and packaging; low-k materials; and reliability and yield.
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Specificații

ISBN-13: 9781605111254
ISBN-10: 1605111252
Pagini: 769
Dimensiuni: 158 x 235 x 43 mm
Greutate: 1.13 kg
Editura: Materials Research Society
Colecția Materials Research Society
Seria MRS Conference Proceedings

Locul publicării:Warrendale, Pittsburgh, United States

Descriere

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.