Ceramics Processing in Microtechnology

An overview of the current status of processing of ceramic materials in micro technology, this book covers topics ranging from design, through material development and synthesis, to microforming, thermal processing and metrology strategies. Processing technologies form a significant part of the book and include replication techniques, tooling and mould fabrication and also special techniques such as embossing, electrophoretic deposition, high-pressure injection moulding and prototyping. The book also discusses subtractive and additive process technologies as well as quality assurance, metrology, and test equipment for micro components.