Cleanrooms: Facilities and Practices
Autor Michael Kozickien Limba Engleză Paperback – 11 apr 2012
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Specificații
ISBN-13: 9789401179522
ISBN-10: 9401179522
Pagini: 388
Ilustrații: X, 374 p.
Dimensiuni: 152 x 229 x 25 mm
Greutate: 0.56 kg
Ediția:1991
Editura: SPRINGER NETHERLANDS
Colecția Springer
Locul publicării:Dordrecht, Netherlands
ISBN-10: 9401179522
Pagini: 388
Ilustrații: X, 374 p.
Dimensiuni: 152 x 229 x 25 mm
Greutate: 0.56 kg
Ediția:1991
Editura: SPRINGER NETHERLANDS
Colecția Springer
Locul publicării:Dordrecht, Netherlands
Public țintă
ResearchCuprins
1. Introduction to Cleanroom Technology.- The Need for Cleanrooms.- An Overview of Semiconductor Technology.- Other Cleanroom Applications.- The Impact of Cleanroom Technology.- 2. Microcontamination.- Types of Contamination.- Sources of Contamination.- Effects of Contamination.- Summary.- 3. Controlled Environment Concepts.- Performance Considerations.- Performance Standards.- Parameter Measurement.- Summary.- 4. Creating Clean Areas.- Construction Materials and Techniques.- Air Filtration.- Airflow.- Equipment and Material Decontamination.- Bringing Items into the Cleanroom.- Summary.- 5. Cleanroom Layout.- Mixed Flow Rooms.- Local Unidirectional Flow.- Modular Cleanrooms.- Tunnel Cleanrooms.- Total Vertical Laminar Flow.- Horizontal Laminar Flow.- Process Equipment.- Designing for Cleanroom Class.- Summary.- 6. Preconditioning, Control, and Static.- Air Handling Systems.- Fans and Air Control.- Static.- Summary.- 7. Site and Structural Considerations.- Vibration.- Site Selection.- Structure.- Internal Vibration Engineering.- Summary.- 8. Cleanrooms, Codes, and Legislation.- Principal Codes.- Fire Protection.- Legislation.- Summary.- 9. Ultrapure Water.- The Need for Ultrapure Water.- Constituents of Raw Water.- Purification Techniques.- RO/DI System Configurations.- Operational Considerations.- Summary.- 10. Production Materials.- Gases.- Wet Chemicals.- Handling Other Materials.- Summary.- 11. Personnel and Contamination.- Apparel.- Use of Apparel.- Work Practices.- Summary.- 12. Safety Issues.- Properties of Hazardous Production Materials.- Cleanroom Safety Practices.- Safety Equipment.- Handling Hazardous Production Materials.- Summary.- 13. The Future of Controlled Environments.- Advanced Cleanroom Concepts.- Enclosed Transfer Systems.- Robotics and Automation.-In-situ Processing.- Epilog—The Cleanroom as a System.- Appendix 1 Federal Standard 209D.- Appendix 2 Simplified Cleanroom Certification Procedure.- Appendix 3 Program and Sample Output.