Excimer Laser Technology
Editat de Dirk Basting, Gerd Marowskyen Limba Engleză Hardback – 21 apr 2005
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Specificații
ISBN-13: 9783540200567
ISBN-10: 3540200568
Pagini: 433
Ilustrații: XX, 433 p.
Dimensiuni: 155 x 235 x 21 mm
Greutate: 1.8 kg
Ediția:2005
Editura: Springer Berlin, Heidelberg
Colecția Springer
Locul publicării:Berlin, Heidelberg, Germany
ISBN-10: 3540200568
Pagini: 433
Ilustrații: XX, 433 p.
Dimensiuni: 155 x 235 x 21 mm
Greutate: 1.8 kg
Ediția:2005
Editura: Springer Berlin, Heidelberg
Colecția Springer
Locul publicării:Berlin, Heidelberg, Germany
Public țintă
ResearchCuprins
Introductory Remarks.- Fundamentals.- Some Fundamentals of Laser Physics.- Principles of Excimer Lasers.- Design and Technology of Excimer Lasers.- High-Repetition-Rate and High-Power Lasers.- High-Energy Lasers.- Excimer Lasers for Microlithography.- Laser Beam Characterization.- Optical Coatings for Excimer Laser Applications.- Small Structures with Large Excimer Lasers.- Historical Review of Excimer Laser Development.- Applications.- Overview.- Ablation.- Micro-Machining.- Via Drilling.- Micro-Processing of Borosilicate Glass and Polymers.- F2-Laser Microfabrication for Photonics and Biophotonics.- Nano-Structuring with Femtosecond Excimer Laser Pulses.- Physical Aspects of Ultra-Fast UV Laser Transfer.- Microlithography.- TFT Annealing.- Fiber Bragg Gratings.- Marking.- Activation and Metallization of Dielectrics.- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films.- Combustion Analysis.- Medical Applications of Excimer Lasers.- High-Intensity Applications of Excimer Lasers.- High-Repetition-Rate Applications of Excimer Lasers.- New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm.- Trends in Worldwide Excimer Laser Sales.
Recenzii
From the reviews:
"This book is one of the few books devoted to excimer lasers and their applications. … anyone working in the field of lasers or materials processing can take advantage of it. The editor has done the effort to include a list of abbreviations and also an alphabetic register, which enhances the usefulness of the book. The quality of printing and layout is perfect." (Erik Stijns, Physicalia, Vol. 28 (4-6), 2006)
"This book is one of the few books devoted to excimer lasers and their applications. … anyone working in the field of lasers or materials processing can take advantage of it. The editor has done the effort to include a list of abbreviations and also an alphabetic register, which enhances the usefulness of the book. The quality of printing and layout is perfect." (Erik Stijns, Physicalia, Vol. 28 (4-6), 2006)
Textul de pe ultima copertă
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology.
Additional chapters on optics, devices and laser systems complete this compact handbook.
A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
Additional chapters on optics, devices and laser systems complete this compact handbook.
A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
Caracteristici
Written by leading authorities on the subject
One of the major laser sources in Physics, Chemistry and Medicine
One of the major laser sources in Physics, Chemistry and Medicine