Ferroelectricity in Doped Hafnium Oxide: Materials, Properties and Devices: Woodhead Publishing Series in Electronic and Optical Materials
Editat de Uwe Schroeder, Cheol Seong Hwang, Hiroshi Funakuboen Limba Engleză Paperback – 28 mar 2019
Additional chapters consider the modeling of ferroelectric phase transformation, structural characterization, and the differences and similarities between HFO2 and standard ferroelectric materials. Finally, HfO2 based devices are summarized.
- Explores all aspects of the structural and electrical properties of HfO2, including processes, modelling and implementation into semiconductor devices
- Considers potential applications including FeCaps, FeFETs, NCFETs, FTJs and more
- Provides comparison of an emerging ferroelectric material to conventional ferroelectric materials with insights to the problems of downscaling that conventional ferroelectrics face
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Specificații
ISBN-13: 9780081024300
ISBN-10: 0081024304
Pagini: 570
Dimensiuni: 152 x 229 x 28 mm
Greutate: 0.75 kg
Editura: ELSEVIER SCIENCE
Seria Woodhead Publishing Series in Electronic and Optical Materials
ISBN-10: 0081024304
Pagini: 570
Dimensiuni: 152 x 229 x 28 mm
Greutate: 0.75 kg
Editura: ELSEVIER SCIENCE
Seria Woodhead Publishing Series in Electronic and Optical Materials
Public țintă
Materials Scientists and Engineers, R&D in ferroelectric memoryCuprins
1. Fundamentals of Ferroelectric and piezoelectric properties 2. HfO2 processes 3. Dopant screening for optimization of the ferroelectric properties 4. Electrode screening for capacitor applications 5. Phase transition 6. Switching kinetics 7. Impact of oxygen vacancies 8. Epitaxial growth of ferroelectric HfO2 9. Thickness scaling Chapter 10. Simulation/Modelling 11. Structural characterization on a nanometer scale: PFM, TEM 12. Comparison to standard ferroelectric materials 13. FE HfO2 based devices