Handbook of Chemical Vapor Deposition: Principles, Technology and Applications
Autor Hugh O. Piersonen Limba Engleză Hardback – 31 aug 1999
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Specificații
ISBN-13: 9780815514329
ISBN-10: 0815514328
Pagini: 506
Dimensiuni: 152 x 229 x 29 mm
Greutate: 0.84 kg
Ediția:New.
Editura: ELSEVIER SCIENCE
ISBN-10: 0815514328
Pagini: 506
Dimensiuni: 152 x 229 x 29 mm
Greutate: 0.84 kg
Ediția:New.
Editura: ELSEVIER SCIENCE
Public țintă
Completely up-to-date look at the entire chemical vapor deposition process, for engineers and technologists in the semiconductor, optoelectronic, optics, cutting tool, refractory fibers, filter and other industries.Cuprins
Introduction and General ConsiderationsFundamentals of Chemical Vapor DepositionThe Chemistry of CVDMetallo-Organic CVD (MOCVD)CVD Processes and EquipmentThe CVD of MetalsThe CVD of the Allotropes of CarbonThe CVD of Non-Metallic ElementsThe CVD of Ceramic Materials: CarbidesThe CVD of Ceramic Materials: NitridesThe CVD of Ceramic Materials: OxidesThe CVD of Ceramic Materials: Borides, Silicides, III-V Compounds and II-VI Compounds (Chalcogenides)CVD in Electronic Applications: SemiconductorsCVD in Electronic Applications: Conductors, Insulators, and Diffusion BarriersCVD in Optoelectronic and Ferroelectric ApplicationsCVD in Optical ApplicationsCVD in Wear- and Corrosion-Resistant ApplicationsCVD in Cutting-Tool ApplicationsCVD in Fiber, Powder, and Monolithic ApplicationsConversion GuideAppendix: Alternative Processes for Thin-Film Deposition and Surface Modification
Recenzii
"...presents an objective and systematic assessment." --High Tech Ceramics News