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Handbook of Cleaning in Semiconductor Manufacturing – Fundamental and Applications: Wiley-Scrivener

Autor KA Reinhardt
en Limba Engleză Hardback – 3 feb 2011
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.
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Specificații

ISBN-13: 9780470625958
ISBN-10: 0470625953
Pagini: 614
Dimensiuni: 178 x 254 x 36 mm
Greutate: 1.18 kg
Editura: Wiley
Seria Wiley-Scrivener

Locul publicării:Hoboken, United States

Public țintă

  • Any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing
  • Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industry that assures cleanliness of chemicals, materials, and equipment in the manufacturing area
  • Semiconductor manufacturing process engineers, process development engineers, and integration engineers, equipment application and process engineers, and clean chemical process engineers

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