Handbook of Cleaning in Semiconductor Manufacturing – Fundamental and Applications de KA Reinhardt

Handbook of Cleaning in Semiconductor Manufacturing – Fundamental and Applications: Wiley-Scrivener

Autor KA Reinhardt

en Limba Engleză Hardback – 3 feb 2011

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

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Specificații

ISBN-13: 9780470625958
ISBN-10: 0470625953
Pagini: 614
Dimensiuni: 178 x 254 x 36 mm
Greutate: 1.18 kg
Editura: Wiley
Seria Wiley-Scrivener

Locul publicării:Hoboken, United States

Public țintă

Any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing
Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industry that assures cleanliness of chemicals, materials, and equipment in the manufacturing area
Semiconductor manufacturing process engineers, process development engineers, and integration engineers, equipment application and process engineers, and clean chemical process engineers

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