Cantitate/Preț
Produs

Handbook of Semiconductor Silicon Technology

Autor William C. O'Mara, Robert B. Herring, Lee P. Hunt
en Limba Engleză Hardback – 30 dec 1990
This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth.

Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.
Citește tot Restrânge

Preț: 130619 lei

Preț vechi: 178931 lei
-27% Nou

Puncte Express: 1959

Preț estimativ în valută:
24995 25825$ 20792£

Carte tipărită la comandă

Livrare economică 20 martie-03 aprilie

Preluare comenzi: 021 569.72.76

Specificații

ISBN-13: 9780815512370
ISBN-10: 0815512376
Pagini: 816
Ilustrații: 1
Dimensiuni: 152 x 229 x 43 mm
Greutate: 1.18 kg
Ediția:New.
Editura: ELSEVIER SCIENCE

Public țintă

Engineers and technologists in the semiconductor, optoelectronic, optics, cutting tool, refractory fibers, filter and other industries.

Cuprins

Silicon Precursors: Their Manufacture and Properties
Polysilicon Preparation
Crystal Growth of Silicon
Silicon Wafer Preparation
Silicon Epitaxy
Silicon Material Properties
Oxygen, Carbon and Nitrogen in Silicon
Carrier Lifetimes in Silicon
Preparation and Properties of Polycrystalline-Silicon Films
Silicon Phase Diagrams
References
Index

Recenzii

"...comprehensive, up-to-date book..." --SAMPE Journal