Handbook of Semiconductor Silicon Technology
Autor William C. O'Mara, Robert B. Herring, Lee P. Hunten Limba Engleză Hardback – 30 dec 1990
Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.
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Specificații
ISBN-13: 9780815512370
ISBN-10: 0815512376
Pagini: 816
Ilustrații: 1
Dimensiuni: 152 x 229 x 43 mm
Greutate: 1.18 kg
Ediția:New.
Editura: ELSEVIER SCIENCE
ISBN-10: 0815512376
Pagini: 816
Ilustrații: 1
Dimensiuni: 152 x 229 x 43 mm
Greutate: 1.18 kg
Ediția:New.
Editura: ELSEVIER SCIENCE
Public țintă
Engineers and technologists in the semiconductor, optoelectronic, optics, cutting tool, refractory fibers, filter and other industries.Cuprins
Silicon Precursors: Their Manufacture and Properties
Polysilicon Preparation
Crystal Growth of Silicon
Silicon Wafer Preparation
Silicon Epitaxy
Silicon Material Properties
Oxygen, Carbon and Nitrogen in Silicon
Carrier Lifetimes in Silicon
Preparation and Properties of Polycrystalline-Silicon Films
Silicon Phase Diagrams
References
Index
Polysilicon Preparation
Crystal Growth of Silicon
Silicon Wafer Preparation
Silicon Epitaxy
Silicon Material Properties
Oxygen, Carbon and Nitrogen in Silicon
Carrier Lifetimes in Silicon
Preparation and Properties of Polycrystalline-Silicon Films
Silicon Phase Diagrams
References
Index
Recenzii
"...comprehensive, up-to-date book..." --SAMPE Journal