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Introduction to Microsystem Design de Werner Karl Schomburg

Introduction to Microsystem Design: RWTHedition

Autor Werner Karl Schomburg
en Limba Engleză Paperback – 3 aug 2013
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
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Specificații

ISBN-13: 9783642268526
ISBN-10: 3642268528
Pagini: 344
Ilustrații: XXII, 322 p.
Dimensiuni: 155 x 235 x 18 mm
Greutate: 0.49 kg
Ediția:2011
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria RWTHedition

Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

Preface.- Notations and symbols.- Introduction.- Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies between physical domains.- Mechanical devices for electronics.- Pressure sensors.- Flow sensors.- Inertial sensors.

Notă biografică

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

Textul de pe ultima copertă

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems.
For quick reference equations are presented in tables which are found in an index at the end of this book.

Caracteristici

Many tables with equations required for calculations of basic elements Systematic description of most actuators and sensors in micro technique Includes exercises Characteristic curves of most actuators and sensors Includes supplementary material: sn.pub/extras