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Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products

Editat de Norio Taniguchi Tsuguo Kohno, Kazuo Maruyama, Kiyoshi Iizuka, Iwao Miyamoto, Toshio Dohi
en Limba Engleză Hardback – 24 iul 1996
The manufacture of integrated circuits and opto- electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is the world leaders.The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer) = 0.001 m. Since the distance between lattice atoms is about 0.3 nm this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. This means that the accuracy and resolution of the positioning and measuring apparatus used in atomic bit processing must at least be on the order of sub-nm. Nanotechnology is thus concerned with integrated processing systems with measurement, position control, and processing technologies in the sub-nm range. This is essential in the fabrication of extremely precise and fine parts. fabrication of extremely precise and fine parts.
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Specificații

ISBN-13: 9780198562832
ISBN-10: 0198562837
Pagini: 422
Ilustrații: halftones, numerous line figures, tables
Dimensiuni: 194 x 253 x 27 mm
Greutate: 1.01 kg
Ediția:New.
Editura: OUP OXFORD
Colecția OUP Oxford
Locul publicării:Oxford, United Kingdom