Semiconductor Process Reliability in Practice de Zhenghao Gan

Semiconductor Process Reliability in Practice

Autor Zhenghao Gan, Waisum Wong, Juin Liou

en Limba Engleză Hardback – 16 noi 2012

Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.

Proven processes for ensuring semiconductor device reliability

Co-written by experts in the field, Semiconductor Process Reliability in Practice contains detailed descriptions and analyses of reliability and qualification for semiconductor device manufacturing and discusses the underlying physics and theory. The book covers initial specification definition, test structure design, analysis of test structure data, and final qualification of the process. Real-world examples of test structure designs to qualify front-end-of-line devices and back-end-of-line interconnects are provided in this practical, comprehensive guide.
Coverage includes:

Basic device physics
Process flow for MOS manufacturing
Measurements useful for device reliability characterization
Hot carrier injection
Gate-oxide integrity (GOI) and time-dependentdielectric breakdown (TDDB)
Negative bias temperature instability
Plasma-induced damage
Electrostatic discharge protection of integrated circuits
Electromigration
Stress migration
Intermetal dielectric breakdown

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Specificații

ISBN-13: 9780071754279
ISBN-10: 007175427X
Pagini: 624
Ilustrații: Illustrations
Dimensiuni: 163 x 236 x 38 mm
Greutate: 0.99 kg
Editura: McGraw Hill Education
Colecția McGraw-Hill
Locul publicării:United States