Industrial Plasma Engineering: Volume 2: Applications to Nonthermal Plasma Processing
Autor J Reece Rothen Limba Engleză Paperback – 7 ian 2019
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Specificații
ISBN-13: 9780367455149
ISBN-10: 0367455145
Pagini: 658
Dimensiuni: 156 x 234 mm
Greutate: 0.45 kg
Ediția:1
Editura: CRC Press
Colecția CRC Press
ISBN-10: 0367455145
Pagini: 658
Dimensiuni: 156 x 234 mm
Greutate: 0.45 kg
Ediția:1
Editura: CRC Press
Colecția CRC Press
Cuprins
Surface Interactions in Plasma Processing. Atmospheric Pressure Plasma Sources. Vacuum Plasma Sources. Plasma Reactors for Plasma Processing. Specialized Techniques and Devices for Plasma Processing. Parametric Plasma Effects on Plasma Processing. Diagnostics for Plasma Processing. Plasma Treatment of Surfaces. Surface Modification by Implantation and Diffusion. Thin Film Deposition by Evaporative Condensation and Sputtering. Plasma Chemical Vapor Deposition (PCVD). Plasma Etching.
Notă biografică
J Reece Roth Department of Electrical and Computer Engineering University of Tennessee, Knoxville
Descriere
Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low-temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices tha
Recenzii
I enjoyed reading the book and recommend it highly to others as a clearly written, well-illustrated and very informative text, which brings up to date the material in several older classics
- Fusion Technology
- Fusion Technology