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Industrial Plasma Engineering: Volume 2: Applications to Nonthermal Plasma Processing

Autor J Reece Roth
en Limba Engleză Paperback – 7 ian 2019
Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that are of commercial interest. The text is suitable for students or in-service users with a physics and calculus background at the sophomore level. These two volumes are intended to be used as textbooks at the senior or first-year graduate level by students from all engineering and physical science disciplines and as a reference source by in-service engineers.
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Specificații

ISBN-13: 9780367455149
ISBN-10: 0367455145
Pagini: 658
Dimensiuni: 156 x 234 mm
Greutate: 0.45 kg
Ediția:1
Editura: CRC Press
Colecția CRC Press

Cuprins

Surface Interactions in Plasma Processing. Atmospheric Pressure Plasma Sources. Vacuum Plasma Sources. Plasma Reactors for Plasma Processing. Specialized Techniques and Devices for Plasma Processing. Parametric Plasma Effects on Plasma Processing. Diagnostics for Plasma Processing. Plasma Treatment of Surfaces. Surface Modification by Implantation and Diffusion. Thin Film Deposition by Evaporative Condensation and Sputtering. Plasma Chemical Vapor Deposition (PCVD). Plasma Etching.

Notă biografică

J Reece Roth Department of Electrical and Computer Engineering University of Tennessee, Knoxville

Descriere

Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low-temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices tha

Recenzii

I enjoyed reading the book and recommend it highly to others as a clearly written, well-illustrated and very informative text, which brings up to date the material in several older classics
- Fusion Technology