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Molecular Beam Epitaxy: Fundamentals and Current Status: Springer Series in Materials Science, cartea 7

Autor Marian A. Herman, Helmut Sitter
en Limba Engleză Paperback – 3 oct 2013
Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. It discusses the most important aspects of the MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural parameters of the grown (or growing) film or structure to the technologically relevant procedure. In this second edition two new fields have been added: crystallization of as-grown low-dimensional heterostructures, mainly quantum wires and quantum dots, and in-growth control of the MBE crystallization process of strained-layer structures. Out-of-date material has been removed.
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Specificații

ISBN-13: 9783642800627
ISBN-10: 3642800629
Pagini: 476
Ilustrații: XIV, 453 p. 53 illus., 25 illus. in color.
Dimensiuni: 155 x 235 x 29 mm
Greutate: 0.66 kg
Ediția:2nd ed. 1996. Softcover reprint of the original 2nd ed. 1996
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria Springer Series in Materials Science

Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

Background Information.- 1. Introduction.- Technological Equipment.- 2. Sources of Atomic and Molecular Beams.- 3. High-Vacuum Growth and Processing Systems.- Characterization Methods.- 4. Characterization Techniques.- MBE Growth Process.- 5. MBE Growth Processes of Lattice-Matched Structures.- 6. Growth Processes in Strained-Layer MBE.- 7. Material-Related Growth Characteristics in MBE.- Conclusion.- 8. Outlook.- References.

Textul de pe ultima copertă

Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. This monograph discusses the most important aspects of an MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural para- meters of the grown (or growing) field or structure to the technologically relevant parameters of the crystallization procedure. In the present second edition two new fields of activity, which emerged in the 1990s have been addressed. These are: (i) crystallization of as-grown low-dimensional heterostructures, mainly quantum wires and quantum dots, and (ii) in-growth control of the MBE crystallization process of strained-layer structures in order to achieve the highly pre- ferred mode of crystallization, the perfect layer-by-layer growth. A substantial part of the "first edition text", which lost its present-day interest has been removed to have sufficiant space for the most current topics in MBE.