Ceramic Thick Films for MEMS and Microdevices: Micro and Nano Technologies
Autor Robert A. Doreyen Limba Engleză Paperback – 18 aug 2016
- Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups
- Written by a single author, this book provides a clear, coherently written guide to this important emerging technology
- Covers materials, fabrication and applications in one book
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Specificații
ISBN-13: 9780128103579
ISBN-10: 0128103574
Pagini: 192
Dimensiuni: 191 x 235 mm
Greutate: 0.38 kg
Editura: ELSEVIER SCIENCE
Seria Micro and Nano Technologies
ISBN-10: 0128103574
Pagini: 192
Dimensiuni: 191 x 235 mm
Greutate: 0.38 kg
Editura: ELSEVIER SCIENCE
Seria Micro and Nano Technologies
Public țintă
Engineers working in the semiconductor / MEMS industry – in design, manufacturing and R&D functions; Engineers in industry sectors using MEMS devices, from automotive / aerospace to biosensors / medicine; Researchers and graduate students in academic institutions.Cuprins
Integration and applications
Routes to thick films
Thick film deposition techniques
Microstructure-property relationships
Pattering and structuring
Houston, we have a problem: Thick film troubleshooting
Recipes and techniques
Routes to thick films
Thick film deposition techniques
Microstructure-property relationships
Pattering and structuring
Houston, we have a problem: Thick film troubleshooting
Recipes and techniques