Cantitate/Preț
Produs

Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals: Springer Theses

Autor Daniel Montero Álvarez
en Limba Engleză Paperback – 9 ian 2022
This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.
Citește tot Restrânge

Toate formatele și edițiile

Toate formatele și edițiile Preț Express
Paperback (1) 62078 lei  43-57 zile
  Springer International Publishing – 9 ian 2022 62078 lei  43-57 zile
Hardback (1) 62681 lei  43-57 zile
  Springer International Publishing – 9 ian 2021 62681 lei  43-57 zile

Din seria Springer Theses

Preț: 62078 lei

Preț vechi: 73033 lei
-15% Nou

Puncte Express: 931

Preț estimativ în valută:
11882 12384$ 9891£

Carte tipărită la comandă

Livrare economică 06-20 ianuarie 25

Preluare comenzi: 021 569.72.76

Specificații

ISBN-13: 9783030638283
ISBN-10: 3030638286
Ilustrații: XXXVI, 230 p. 137 illus., 124 illus. in color.
Dimensiuni: 155 x 235 mm
Greutate: 0.38 kg
Ediția:1st ed. 2021
Editura: Springer International Publishing
Colecția Springer
Seria Springer Theses

Locul publicării:Cham, Switzerland

Cuprins

Introduction.- Experimental techniques.- Results: NLA using a short pulse duration KrF laser.- Results: NLA using a long pulse duration XeCl laser.- Results: Integrating the supersaturated material in a CMOS pixel matrix.

Notă biografică

Daniel Montero was born in Guadalajara (Spain) in 1990. His passion for nature and technology, inherited from his mother and father respectively, led him to pursue a Physics degree at Complutense University of Madrid. He later got at the same university a Masters Degree in Renewable energies, and finally the PhD in Physics with European and Cum Laude special mentions. Recently, he joined IMEC in Belgium to continue his professional career as R&D Engineer in Plasma Etch. 

Textul de pe ultima copertă

This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.

Caracteristici

Nominated as an outstanding Ph.D. thesis by the Universidad Complutense de Madrid, Madrid, Spain Provides basic research in a novel material based on silicon, which is later integrated into an industrial CMOS Image Sensor prototype Presents a methodology to combine two fast, non-destructive and reliable techniques to quickly identify the fast melting and solidification regimes after a nanosecond laser process