Optimal Synthesis Methods for MEMS: Microsystems, cartea 13
Editat de S.G.K. Ananthasureshen Limba Engleză Hardback – 30 noi 2003
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Specificații
ISBN-13: 9781402076206
ISBN-10: 1402076207
Pagini: 320
Ilustrații: XIII, 320 p. 187 illus.
Dimensiuni: 155 x 235 x 21 mm
Greutate: 0.65 kg
Ediția:2003
Editura: Springer Us
Colecția Springer
Seria Microsystems
Locul publicării:New York, NY, United States
ISBN-10: 1402076207
Pagini: 320
Ilustrații: XIII, 320 p. 187 illus.
Dimensiuni: 155 x 235 x 21 mm
Greutate: 0.65 kg
Ediția:2003
Editura: Springer Us
Colecția Springer
Seria Microsystems
Locul publicării:New York, NY, United States
Public țintă
ResearchCuprins
1 Introduction.- 1. Design of Microelectromechanical Systems.- 2. Synthesis vs. Analysis.- 3. Optimization as a synthesis tool.- 4. Contents of the chapters.- 5. Closure.- 2 Synthesis for Mechanical Behavior.- 1. Introduction.- 2. Synthesis of beam-like structures.- 3. Topology Synthesis.- 4. Synthesis for dynamic attributes.- 5. Conclusions.- 3 Synthesis of Electrostatically Actuated Mems.- 1. Introduction.- 2. Governing Equations.- 3. Shape Synthesis of Electrostatically Driven Actuators.- 4. An Example: Variable Comb-drive Actuators.- 5. Closure.- 4 Synthesis Methods for Electrothermal Actuation.- 1. Introduction.- 2. Generalization of the BasiC electro-thermal actuator.- 3. Modeling.- 4. Synthesis.- 5. Numerical examples.- 6. Alternative implementation using “line elements”.- 7. Advanced example.- 8. MicroFabrication.- 9. Closure.- 5 Synthesis with Piezoelectric Actuation.- 1. Introduction.- 2. Background Theory for Piezoelectricity.- 3. FEM Applied to Piezoelectricity.- 4. Flextensional Actuator Design.- 5. Conclusion.- 6 Synthesis of Piezocomposites.- 1. Piezocomposite Design.- 2. Homogenization Method.- 3. Piezocomposite Design Problem.- 4. Examples.- 5. Conclusions.- 7 Synthesis of Periodic Micro Mechanisms.- 1. Introduction.- 2. Numerical homogenization, FE modeling, and sensitivity analysis.- 3. Formulation of the problem.- 4. Numerical implementation.- 5. Examples.- 6. Wave propagation.- 7. Concluding remarks.- 8 Process Synthesis.- 1. Introduction.- 2. State-space representation.- 3. Planar device representation.- 4. Basic synthesis method.- 5. Cardinality of design space.- 6. Granularity control through condensation.- 7. Other miscellaneous graph-theoretical results.- 8. Process flow construction.- 9. Determination of selective operators.- 10. Processflow parameters.- 11. Software implementation.- 12. Compiler testing.- 13. Summary.- 9 Mask Synthesis.- 1. Introduction.- 2. Related work.- 3. Mathematical framework.- 4. Synthesis.- 5. Examples.- 6. Conclusions.- 10 System-Level Synthesis.- 1. MEMS Design representations.- 2. Synthesis Methodology.- 3. Performance Models.- 4. Synthesis Results.- 5. Summary.