Particles on Surfaces 1: Detection, Adhesion, and Removal
Editat de K.L. Mittalen Limba Engleză Paperback – 19 feb 2012
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Specificații
ISBN-13: 9781461595335
ISBN-10: 1461595339
Pagini: 396
Ilustrații: X, 384 p.
Dimensiuni: 178 x 254 x 21 mm
Greutate: 0.69 kg
Ediția:1988
Editura: Springer Us
Colecția Springer
Locul publicării:New York, NY, United States
ISBN-10: 1461595339
Pagini: 396
Ilustrații: X, 384 p.
Dimensiuni: 178 x 254 x 21 mm
Greutate: 0.69 kg
Ediția:1988
Editura: Springer Us
Colecția Springer
Locul publicării:New York, NY, United States
Public țintă
ResearchCuprins
I. General Papers.- Fine Particles on Semiconductor Surfaces: Sources, Removal and Impact on the Semiconductor Industry.- Cleaning Semiconductor Surfaces: Facts and Foibles.- Effect of Chemical Cleaning Sequencing on Particle Addition/Reduction on Silicon Wafers.- Measuring Aerosol Particle Concentration in Clean Rooms and Particle Areal Density on Silicon Wafer Surfaces.- Particulate Contamination on Wafer Surfaces Resulting From Hexamethyldisilazane/Water Interactions.- Contamination of Chip Surfaces by Particles During Destructive Physical Analysis of Integrated Circuit Devices.- Calculation of Hamaker Coefficients for Metallic Aerosols from Extensive Optical Data.- Soiling Mechanisms and Performance of Anti-Soiling Surface Coatings.- Implications of Particulate Contamination in the Performance of Floppy Disks.- II. Particle-Substrate Interaction and Particle Adhesion.- A Theoretical Review of Particle Adhesion.- The Electrostatic Force on a Dielectric Sphere Resting on a Conducting Substrate.- Electrostatic Charge Generation on Wafer Surfaces and Its Effect on Particulate Deposition.- Toner Adhesion in Electrophotography.- Adhesion and Removal of Particles: Effect of Medium.- Strong Adhesion of Dust Particles.- Prevention of Strong Adhesion of Dust Particles.- Dynamic Adhesion of Particles Impacting a Cylinder.- Crossed Fiber Models of the Particle-Surface Interaction.- Sensitive New Method for the Determination of Adhesion Force Between a Particle and a Substrate.- III. Particle Detection, Analysis and Characterization.- Detection of Particles on Clean Surfaces.- Detection of Particles Down to a “Few” Micrometers on Non-Specular Microelectronic Substrates and Other Surfaces.- Accurate Particle Counting for Bare Substrate Inspection.- Automated SEM/EDS ImageAnalysis of Particles on Filter Blanks.- Particle Sizing and Counting with the Inspex EX20/20.- IV. Particle Removal.- Methods for Surface Particle Removal: A Comparative Study.- Electrostatic Removal of Particles from Surfaces.- Electric Field Detachment of Charged Particles.- A New Approach to the Removal of Sub-Micron Particles From Solid (Silicon) Substrates.- About the Contributors.