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Chemical-Mechanical Polishing 2000 – Fundamentals and Materials Issues: Volume 613: MRS Proceedings

Editat de Rajiv K. Singh, Rajeev Bajaj, Mansour Moinpour, Marc Meuris
en Limba Engleză Paperback – 4 iun 2014
Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in semiconductor manufacturing. Other emerging applications for this technology include flat-panel displays, magnetic data storage and microelectromechanical systems. The rapid emergence of copper as the conducting material for integrated circuits has further pushed CMP technology to the forefront of semiconductor manufacturing. However, a basic understanding of the CMP process, which is necessary to enable further advances, is inadequate. This book, first published in 2001, provides an insight into the fundamental processes in CMP. Presentations from academia, government institutions and industry are featured. Topics include: CMP mechanisms; dielectric and metal CMP; process integration and manufacturability; and CMP consumables.
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Specificații

ISBN-13: 9781107413146
ISBN-10: 1107413141
Pagini: 176
Dimensiuni: 152 x 229 x 10 mm
Greutate: 0.25 kg
Editura: Cambridge University Press
Colecția Cambridge University Press
Seria MRS Proceedings

Locul publicării:New York, United States

Descriere

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
 
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