CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications: Microtechnology and MEMS
Autor D. Lange, O. Brand, H. Baltesen Limba Engleză Hardback – 23 iul 2002
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Specificații
ISBN-13: 9783540431435
ISBN-10: 3540431438
Pagini: 156
Ilustrații: VIII, 142 p.
Dimensiuni: 155 x 235 x 14 mm
Greutate: 0.34 kg
Ediția:2002
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria Microtechnology and MEMS
Locul publicării:Berlin, Heidelberg, Germany
ISBN-10: 3540431438
Pagini: 156
Ilustrații: VIII, 142 p.
Dimensiuni: 155 x 235 x 14 mm
Greutate: 0.34 kg
Ediția:2002
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria Microtechnology and MEMS
Locul publicării:Berlin, Heidelberg, Germany
Public țintă
ResearchCuprins
1. Introduction.- 2. Design Considerations.- 3. Cantilever Beam Resonators.- 4. Resonant Gas Sensor.- 5. Force Sensors for Parallel Scanning Atomic Force Microscopy.- 6. Conclusions and Outlook.- Appendices.- A.1 Process Sequence Resonant Gas Sensor.- A.2 Process Sequence Resonant Gas Sensor (Maskless).- A.3 Process Sequence AFM Sensor Arrays.- A.4 Material Properties of Thin Film Materials.- References.
Textul de pe ultima copertă
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
Caracteristici
This book describes a vital measuring principle for analysing integrated circuits with a nano-electro-mechanical system Includes supplementary material: sn.pub/extras