Cantitate/Preț
Produs

Modelling of Microfabrication Systems: Microtechnology and MEMS

Autor Raja Nassar, Weizhong Dai
en Limba Engleză Hardback – 13 iun 2003

Toate formatele și edițiile

Toate formatele și edițiile Preț Express
Paperback (1) 94373 lei  6-8 săpt.
  Springer Berlin, Heidelberg – 8 dec 2010 94373 lei  6-8 săpt.
Hardback (1) 94955 lei  6-8 săpt.
  Springer Berlin, Heidelberg – 13 iun 2003 94955 lei  6-8 săpt.

Din seria Microtechnology and MEMS

Preț: 94955 lei

Preț vechi: 115798 lei
-18% Nou

Puncte Express: 1424

Preț estimativ în valută:
18172 18747$ 15380£

Carte tipărită la comandă

Livrare economică 05-19 martie

Preluare comenzi: 021 569.72.76

Specificații

ISBN-13: 9783540002529
ISBN-10: 3540002529
Pagini: 280
Ilustrații: X, 270 p.
Dimensiuni: 155 x 235 x 21 mm
Greutate: 0.56 kg
Ediția:2003
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria Microtechnology and MEMS

Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

1 Ion Beam.- 2 X-ray Lithography.- 3 Laser Chemical Vapor Deposition.- 4 Laser Photopolymerization.- 5 Laser Ablation.- 6 Thin Films.- References.

Recenzii

From the reviews:
"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications’." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)

Textul de pe ultima copertă

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

Caracteristici

First book on modelling of the processing techniques for microsystems Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation Includes supplementary material: sn.pub/extras