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Force Sensors for Microelectronic Packaging Applications: Microtechnology and MEMS

Autor Jürg Schwizer, Michael Mayer, Oliver Brand
en Limba Engleză Hardback – 21 oct 2004
Intended for wire-bonding and flip-chip packaging professionals and for scientists and engineers working in the field of mechanical microsensors, this practical monograph introduces novel measurement technologies that allow for in situ and real-time examination of physical processes during the packaging process or during subsequent reliability tests. The measurement system presented here makes possible measurements at formerly inaccessible packaging interconnects. For the first time it becomes possible to describe the wire-bonding process window in terms of the physical forces at the contact zone instead of the applied machine settings. This is significant for a deeper understanding and future development of these packaging processes. Applications of the sensor in the field of wire bonding and flip-chip characterization are also illustrated. The reader will gain much insight into the important field of interconnection technology in semiconductor packaging.
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Specificații

ISBN-13: 9783540221876
ISBN-10: 3540221875
Pagini: 188
Ilustrații: VIII, 178 p.
Dimensiuni: 155 x 235 x 19 mm
Greutate: 0.43 kg
Ediția:2005
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria Microtechnology and MEMS

Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

Sensor Design.- Measurement System.- Characterization.- Applications.- Conclusions and Outlook.

Textul de pe ultima copertă

This monograph is intended for wire bonding and flip-chip packaging professionals and for scientists and engineers working in the field of mechanical microsensors. New measurement technologies are introduced that allow in situ and real-time examination of physical processes during the packaging process or during subsequent reliability tests. The measurement system presented here enables measurements at formerly inaccessible packaging interconnects. For the first time it becomes possible to describe the wire bonding process window in terms of the physical forces at the contact zone instead of the applied machine settings. This is significant for a deeper understanding of these packaging processes. Applications of the sensor in the field of wire bonding and flip-chip characterization are illustrated. The reader will gain much insight into the important field of interconnection technology in semiconductor packaging.

Caracteristici

Useful technique for packaging process control and analysis Includes supplementary material: sn.pub/extras